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Material aspects and challenges for SOI FinFET integration

dc.contributor.authorVan Dal, Mark
dc.contributor.authorVellianitis, Georgios
dc.contributor.authorDuffy, Ray
dc.contributor.authorPawlak, Bartek
dc.contributor.authorLai, Li-Shyue
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorCollaert, Nadine
dc.contributor.authorJurczak, Gosia
dc.contributor.authorLander, Rob
dc.date.accessioned2021-10-17T11:40:24Z
dc.date.available2021-10-17T11:40:24Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14621
dc.sourceIIOimport
dc.titleMaterial aspects and challenges for SOI FinFET integration
dc.typeMeeting abstract
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorVellianitis, Georgios
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage636
dc.source.conference213th ECS Meeting
dc.source.conferencedate18/05/2008
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - open access
imec.internalnotesECS Meeting Abstracts; Vol. MA 2008-01


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