Publication:

Silicate formation and thermal stability of rare earth oxides as high-k gate dielectrics

Date

2008
Journal article
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Author(s)

Van Elshocht, Sven  
;
Adelmann, Christoph  
;
Conard, Thierry  
;
Delabie, Annelies  
;
Franquet, Alexis  
;
Nyns, Laura  
;
Richard, Olivier  
;
Lehnen, Peer
;
Swerts, Johan  
;
De Gendt, Stefan  

Journal

Journal of Vacuum Science and Technology A

Abstract

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1798 since deposited on 2021-10-17
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Acq. date: 2026-04-25

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