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Sandwich stacks replacing SiO2 in standard bonded Si-on-insulator (SOI) substrates to obtain a high-thermal conductivity HTC-SOI substrate
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1999 since deposited on 2021-10-17
1last month
Acq. date: 2026-01-11
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Metrics
Views
1999 since deposited on 2021-10-17
1last month
Acq. date: 2026-01-11
Citations