Conformal doping for FINFET's: a fabrication and metrology challenge

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Authors
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark
Conference
Stanford & Tohoku University Joint Open Workshop on 3D Transistor and its Applications
Title
Conformal doping for FINFET's: a fabrication and metrology challenge
Publication type
Oral presentation
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