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Conformal doping for FINFET's: a fabrication and metrology challenge

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorRosseel, Erik
dc.contributor.authorJurczak, Gosia
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorEyben, Pierre
dc.contributor.authorMody, Jay
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorPawlak, Bartek
dc.contributor.authorDuffy, R.
dc.contributor.authorVan Dal, Mark
dc.date.accessioned2021-10-17T12:11:39Z
dc.date.available2021-10-17T12:11:39Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14702
dc.sourceIIOimport
dc.titleConformal doping for FINFET's: a fabrication and metrology challenge
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.orcidimecEveraert, Jean-Luc::0000-0002-0660-9090
dc.contributor.orcidimecEyben, Pierre::0000-0003-3686-556X
dc.source.peerreviewno
dc.source.conferenceStanford & Tohoku University Joint Open Workshop on 3D Transistor and its Applications
dc.source.conferencedate6/11/2008
dc.source.conferencelocationStanford, CA USA
imec.availabilityPublished - imec


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