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Conformal doping of FINFET's: a fabrication and metrology challenge
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Acq. date: 2026-01-09
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1 since deposited on 2021-10-17
Acq. date: 2026-01-09
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1918 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-01-09
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