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Conformal doping of FINFET's: a fabrication and metrology challenge

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorRosseel, Erik
dc.contributor.authorJurczak, Gosia
dc.contributor.authorHoffmann, Thomas
dc.contributor.authorEyben, Pierre
dc.contributor.authorMody, Jay
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorPoon, T.
dc.contributor.authordel Agua Borniquel, Jose Ignacio
dc.contributor.authorFoad, M.
dc.contributor.authorDuffy, Ray
dc.contributor.authorPawlak, Bartek
dc.date.accessioned2021-10-17T12:12:10Z
dc.date.available2021-10-17T12:12:10Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14703
dc.sourceIIOimport
dc.titleConformal doping of FINFET's: a fabrication and metrology challenge
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthordel Agua Borniquel, Jose Ignacio
dc.contributor.imecauthorPawlak, Bartek
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage449
dc.source.endpage456
dc.source.conference17th International Conference in Ion Implantation Technology - IIT
dc.source.conferencedate8/06/2008
dc.source.conferencelocationMonterey CA USA
imec.availabilityPublished - open access
imec.internalnotesAIP Conference Publications; Vol. 1066


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