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Conformal doping of FINFET's: a fabrication and metrology challenge

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorMody, Jay
dc.contributor.authorJurczak, Gosia
dc.contributor.authorNguyen, Duy
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorLeys, Frederik
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorEveraert, Jean-Luc
dc.date.accessioned2021-10-17T12:12:59Z
dc.date.available2021-10-17T12:12:59Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14705
dc.sourceIIOimport
dc.titleConformal doping of FINFET's: a fabrication and metrology challenge
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceE-MRS Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices
dc.source.conferencedate26/05/2008
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - open access


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