Publication:

Growth and integration of high-density CNT for advanced interconnects

Date

2008
Meeting abstract
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Author(s)

Vereecken, Philippe  
;
Cott, Daire  
;
Chiodarelli, Nicolo
;
Romo Negreira, Ainhoa  
;
Verhulst, Anne  
;
Hantschel, Thomas  
;
Richard, Olivier  
;
Groeseneken, Guido  
;
Heyns, Marc  
;
De Gendt, Stefan  

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Abstract

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