dc.contributor.author | Vereecken, Philippe | |
dc.contributor.author | Cott, Daire | |
dc.contributor.author | Chiodarelli, Nicolo | |
dc.contributor.author | Romo Negreira, Ainhoa | |
dc.contributor.author | Verhulst, Anne | |
dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Groeseneken, Guido | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-17T12:28:59Z | |
dc.date.available | 2021-10-17T12:28:59Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14742 | |
dc.source | IIOimport | |
dc.title | Growth and integration of high-density CNT for advanced interconnects | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Vereecken, Philippe | |
dc.contributor.imecauthor | Cott, Daire | |
dc.contributor.imecauthor | Romo Negreira, Ainhoa | |
dc.contributor.imecauthor | Verhulst, Anne | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
dc.contributor.orcidimec | Verhulst, Anne::0000-0002-3742-9017 | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | no | |
dc.source.beginpage | 182 | |
dc.source.endpage | 183 | |
dc.source.conference | 14th International Conference on Solid Films and Surfaces - ICSFS | |
dc.source.conferencedate | 29/06/2008 | |
dc.source.conferencelocation | Dublin Ireland | |
dc.identifier.url | www.icsfs.ie | |
imec.availability | Published - imec | |