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Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm

dc.contributor.authorVolders, Henny
dc.contributor.authorRichard, Olivier
dc.contributor.authorCarbonell, Laure
dc.contributor.authorPalmans, Roger
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKellens, Kristof
dc.contributor.authorArmini, Silvia
dc.contributor.authorBender, Hugo
dc.contributor.authorZhao, Larry
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-17T12:37:35Z
dc.date.available2021-10-17T12:37:35Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14763
dc.sourceIIOimport
dc.titleCu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm
dc.typeMeeting abstract
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference - AMC
dc.source.conferencedate23/09/2008
dc.source.conferencelocationSan Diego, CA USA
dc.identifier.urlhttp://www.unex.berkeley.edu/eng/metal/
imec.availabilityPublished - imec


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