Authors
Wang, Gang;
Leys, Frederik;
Souriau, Laurent;
Loo, Roger;
Caymax, Matty;
Brunco, D;
Geypen, Jef;
Bender, Hugo;
Meuris, Marc;
Vandervorst, Wilfried;
Heyns, Marc
Conference
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices
Title
Selective epitaxial growth of Ge on silicon wafers with shallow trench isolation: an approach for Ge virual substrates
Publication type
Proceedings paper
Embargo date
9999-12-31