Authors

Wündisch, C.; Posselt, M.; Anwand, W.; Schmidt, B.; Grötzschel, R.; Mücklich, A.; Skorupa, W.; Simoen, Eddy; Clarysse, Trudo; Satta, Alessandra; Hortenbach, H.; Möller, A.; Pelzing, P.

Conference

E-MRS Spring Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices

Title

n+ doping of Ge by P or As implantation and flash-lamp annealing

Publication type

Meeting abstract