Publication:

n+ doping of Ge by P or As implantation and flash-lamp annealing

Date

2008
Meeting abstract
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Author(s)

Wündisch, C.
;
Posselt, M.
;
Anwand, W.
;
Schmidt, B.
;
Grötzschel, R.
;
Mücklich, A.
;
Skorupa, W.
;
Simoen, Eddy  
;
Clarysse, Trudo
;
Satta, Alessandra
;
Hortenbach, H.
;
Möller, A.
;
Pelzing, P.

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Abstract

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