Dominant layer for stress-induced positive charges in Hf-based gate stacks

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Authors

Zhang, Jian F.; Chang, M.H.; Ji, Z.; Lin, L.; Ferain, Isabelle; Groeseneken, Guido; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc

ISSN

0741-3106

Issue

12

Journal

IEEE Electron Device Letters

Volume

29

Title

Dominant layer for stress-induced positive charges in Hf-based gate stacks

Publication type

Journal article

Embargo date

9999-12-31

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