Publication:
A DRAM compatible Cu contact using self-aligned Ta-silicide and Ta-barrier
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1966 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-01-08
Citations
Metrics
Views
1966 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-01-08
Citations