dc.contributor.author | Zhao, Chao | |
dc.contributor.author | Demuynck, Steven | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Ahn, J.Y. | |
dc.date.accessioned | 2021-10-17T13:11:41Z | |
dc.date.available | 2021-10-17T13:11:41Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14845 | |
dc.source | IIOimport | |
dc.title | Development of a DRAM compatible Cu contact using self-aligned Ta-silicide and Ta-barrier | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Demuynck, Steven | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | Materials for Advanced Metallization Workshop - MAM | |
dc.source.conferencedate | 2/03/2008 | |
dc.source.conferencelocation | Dresden Germany | |
imec.availability | Published - open access | |