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Extraction of the interface and oxide charge density in silicon-on-insulator MOSFETs
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Authors
Simoen, Eddy
;
Claeys, Cor
;
Lukyanchikova, N.
;
Petrichuk, M.
;
Garbar, N.
;
Martino, Joao Antonio
;
Sonnenberg, V.
Conference
Proceedings of the 7th International Symposium on Silicon-on-Insulator Technology and Devices
Title
Extraction of the interface and oxide charge density in silicon-on-insulator MOSFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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