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Basic aspects of the formation and activation of boron junctions using plasma immersion ion implantation
Publication:
Basic aspects of the formation and activation of boron junctions using plasma immersion ion implantation
Date
2008
Proceedings Paper
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16933.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zschaetzsch, Gerd
;
Vandervorst, Wilfried
;
Hoffmann, Thomas
;
Goossens, Jozefien
;
Everaert, Jean-Luc
;
del Agua Borniquel, Jose Ignacio
;
Poon, T.
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1941
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1941
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations