Authors

Zschaetzsch, Gerd; Vandervorst, Wilfried; Hoffmann, Thomas; Goossens, Jozefien; Everaert, Jean-Luc; del Agua Borniquel, Jose Ignacio; Poon, T.

Conference

17th International Conference in Ion Implantation Technology - IIT

Title

Basic aspects of the formation and activation of boron junctions using plasma immersion ion implantation

Publication type

Proceedings paper

Embargo date

9999-12-31