Authors

Ablett, James; Woicik, Joseph; Tokei, Zsolt; List, Scott; Dimasi, Elaine

ISSN

0003-6951

Issue

4

Journal

Applied Physics Letters

Volume

94

Title

Phase identification of self-forming Cu-Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structures

Publication type

Journal article