Publication:
Dry-etch Fin patterning on SOI: transition from 32 to 22nm node on a 6T-SRAM cell
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1902 since deposited on 2021-10-17
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Acq. date: 2026-08-31
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1902 since deposited on 2021-10-17
2last month
Acq. date: 2026-08-31
Citations