Publication:
Dry-etch Fin patterning on SOI: transition from 32 to 22nm node on a 6T-SRAM cell
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1898 since deposited on 2021-10-17
Acq. date: 2025-12-16
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Views
1898 since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations