Study of the altered layer formation under oxygen bombardment in combination with flooding

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Authors
Elst, Kathy; Vandervorst, Wilfried; Bender, Hugo; Alay, Josep Lluis
Conference
Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference
Title
Study of the altered layer formation under oxygen bombardment in combination with flooding
Publication type
Proceedings paper
Embargo date
9999-12-31
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