Authors

Aoulaiche, Marc; Kaczer, Ben; Roussel, Philippe; Houssa, Michel; De Gendt, Stefan; Maes, Herman; Groeseneken, Guido

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

27

Title

Impact of nitridation on recoverable and permanent negative bias temperature instability degradation in high-k/metal-gate p-type metal oxide semiconductor field effect transistors

Publication type

Journal article

Embargo date

9999-12-31