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Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
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Authors
Arstila, Kai
;
Hantschel, Thomas
;
Kleindiek, Stephan
;
Sterr, Jochen
;
Vaquette, Quentin
;
Demeulemeester, Cindy
;
Vandervorst, Wilfried
Conference
35th International Conference on Micro & Nano Engineering - MNE
Title
Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
Publication type
Meeting abstract
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