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Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

dc.contributor.authorArstila, Kai
dc.contributor.authorHantschel, Thomas
dc.contributor.authorKleindiek, Stephan
dc.contributor.authorSterr, Jochen
dc.contributor.authorVaquette, Quentin
dc.contributor.authorDemeulemeester, Cindy
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T21:18:22Z
dc.date.available2021-10-17T21:18:22Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14914
dc.sourceIIOimport
dc.titleOptical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
dc.typeMeeting abstract
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.conference35th International Conference on Micro & Nano Engineering - MNE
dc.source.conferencedate28/09/2009
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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