Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions

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Authors
Bargallo Gonzalez, Mireia; Simoen, Eddy; Hikavyy, Andriy; Verheyen, Peter; Loo, Roger; Caymax, Matty; Machkaoutsan, Vladimir; Tomasini, Pierre; Thomas, S.G.; Wise, Rick; Claeys, Cor
Conference
E-MRS Spring Meeting Symposium I: Silicon and germanium Issues for Future CMOS Devices
Title
Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions
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Meeting abstract
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