Publication:
Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions
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1927 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-11
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Metrics
Views
1927 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-11
Citations