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Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions

dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorTomasini, Pierre
dc.contributor.authorThomas, S.G.
dc.contributor.authorWise, Rick
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-17T21:19:57Z
dc.date.available2021-10-17T21:19:57Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14945
dc.sourceIIOimport
dc.titleImpact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions
dc.typeMeeting abstract
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium I: Silicon and germanium Issues for Future CMOS Devices
dc.source.conferencedate8/06/2009
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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