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Study of the altered layer formation under oxygen bombardment in combination with flooding

dc.contributor.authorElst, Kathy
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.contributor.authorAlay, Josep Lluis
dc.date.accessioned2021-09-29T12:41:09Z
dc.date.available2021-09-29T12:41:09Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/149
dc.sourceIIOimport
dc.titleStudy of the altered layer formation under oxygen bombardment in combination with flooding
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage617
dc.source.endpage620
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference
dc.source.conferencedate7/11/1993
dc.source.conferencelocationYokohama Japan
imec.availabilityPublished - open access


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