Theory of photomodulated optical reflectance on active doping profiles in silicon

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Authors
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex
Conference
15th International Conference on Photoacoustics and Photothermal Phenomena - ICPPP15
Title
Theory of photomodulated optical reflectance on active doping profiles in silicon
Publication type
Meeting abstract
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