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Theory of photomodulated optical reflectance on active doping profiles in silicon

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorDortu, Fabian
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorShaughnessy, Derrick
dc.contributor.authorSalnick, Alex
dc.date.accessioned2021-10-17T21:25:18Z
dc.date.available2021-10-17T21:25:18Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15014
dc.sourceIIOimport
dc.titleTheory of photomodulated optical reflectance on active doping profiles in silicon
dc.typeMeeting abstract
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewno
dc.source.conference15th International Conference on Photoacoustics and Photothermal Phenomena - ICPPP15
dc.source.conferencedate19/07/2009
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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