Authors

Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Nguyen, Duy; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena

Conference

International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling

Title

Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

Publication type

Proceedings paper