Show simple item record

Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures

dc.contributor.authorCarbonell, Laure
dc.contributor.authorVolders, Henny
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKellens, Kristof
dc.contributor.authorTokei, Zsolt
dc.contributor.authorHendrickx, Dirk
dc.contributor.authorStruyf, Herbert
dc.contributor.authorClaes, Martine
dc.contributor.authorVersluijs, Janko
dc.contributor.authorVan Besien, Els
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorCockburn, Andrew
dc.contributor.authorGravey, Virginie
dc.contributor.authorShah, Kavita
dc.contributor.authorAl-Bayati, Amir
dc.contributor.authorFu, X.
dc.contributor.authorLubben, D.
dc.contributor.authorSundarrajan, A.
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-17T21:30:57Z
dc.date.available2021-10-17T21:30:57Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15064
dc.sourceIIOimport
dc.titleImplementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures
dc.typeProceedings paper
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorHendrickx, Dirk
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorCockburn, Andrew
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage91
dc.source.endpage97
dc.source.conferenceAdvanced Metallization Conference 2008 (AMC2008)
dc.source.conferencedate23/09/2008
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
18760.pdf
Size:
1.221Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record