Publication:

Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures

Date

2009

Proceedings Paper

Simple item page Full metadata Statistics

Files

18760.pdf 1.22 MB

Author(s)

Carbonell, Laure

;

;

;

Kellens, Kristof

;

;

Hendrickx, Dirk

;

Struyf, Herbert

;

;

Versluijs, Janko

;

Van Besien, Els

;

Caluwaerts, Rudy

;

Cockburn, Andrew

;

Gravey, Virginie

;

;

Al-Bayati, Amir

;

;

;

Sundarrajan, A.

;

Statistics

1926 since deposited on 2021-10-17

4last month

1last week

Acq. date: 2026-10-12