Publication:

Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures

Date

2009

Proceedings Paper

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Files

18760.pdf 1.22 MB

Author(s)

Carbonell, Laure

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Kellens, Kristof

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Hendrickx, Dirk

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Struyf, Herbert

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Versluijs, Janko

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Van Besien, Els

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Caluwaerts, Rudy

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Cockburn, Andrew

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Gravey, Virginie

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Al-Bayati, Amir

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;

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Sundarrajan, A.

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