Authors

Caymax, Matty; Mitard, Jerome; Martens, Koen; Yang, Lijun; Pourtois, Geoffrey; Vandervorst, Wilfried; Meuris, Marc; Loo, Roger

Conference

Joint American Vacuum Society (AVS) - Taiwan Annual Physical Society Meeting on "Beyond Si CMOS"

Title

Si passivation for high-k gate dielectrics on GE MOSFETs: further developments and understanding

Publication type

Meeting abstract