Authors

Chang, M.H.; Zhao, C.Z.; Ji, Z.; Zhang, J.F.; Groeseneken, Guido; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc

ISSN

0021-8979

Issue

5

Journal

Journal of Applied Physics

Volume

105

Title

On the activation and passivation of precursors for process-induced positive charges in Hf-dielectric stacks

Publication type

Journal article

Embargo date

9999-12-31