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Die stacking using 3D-wafer level packaging copper/polymer through-Si via technology and Cu/Sn interconnect bumping
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Authors
Civale, Yann
;
Sabuncuoglu Tezcan, Deniz
;
Philipsen, Harold
;
Jaenen, Patrick
;
Agarwal, Rahul
;
Duval, Fabrice
;
Soussan, Philippe
;
Travaly, Youssef
;
Beyne, Eric
Conference
IEEE International Conference on 3D System Integration
Title
Die stacking using 3D-wafer level packaging copper/polymer through-Si via technology and Cu/Sn interconnect bumping
Publication type
Proceedings paper
Embargo date
9999-12-31
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