A 60GHz silicon micromachined cavity resonator with integrated tuning MEMS array

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Authors
Dancila, Dragos; Ekkels, Phillip; Simon, Pascal; Jourdain, Anne; Phommahaxay, Alain; Rottenberg, Xavier; Huynen, Isabelle; Ocket, Ilja; Nauwelaers, Bart; Puers, Bob; De Raedt, Walter; Tilmans, Harrie
Conference
MEMSWAVE Symposium
Title
A 60GHz silicon micromachined cavity resonator with integrated tuning MEMS array
Publication type
Proceedings paper
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