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A 60GHz silicon micromachined cavity resonator with integrated tuning MEMS array

dc.contributor.authorDancila, Dragos
dc.contributor.authorEkkels, Phillip
dc.contributor.authorSimon, Pascal
dc.contributor.authorJourdain, Anne
dc.contributor.authorPhommahaxay, Alain
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorHuynen, Isabelle
dc.contributor.authorOcket, Ilja
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-17T21:44:21Z
dc.date.available2021-10-17T21:44:21Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15156
dc.sourceIIOimport
dc.titleA 60GHz silicon micromachined cavity resonator with integrated tuning MEMS array
dc.typeProceedings paper
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorPhommahaxay, Alain
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorOcket, Ilja
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage27
dc.source.endpage30
dc.source.conferenceMEMSWAVE Symposium
dc.source.conferencedate6/07/2009
dc.source.conferencelocationTrento Italy
imec.availabilityPublished - imec


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