Authors

De Roest, David; Vereecke, Bart; Huffman, Craig; Heylen, Nancy; Croes, Kristof; Arai, H.; Takamure, N.; Beynet, Julien; Sprey, Hessel; Matsushita, K.; Kobayashi, N.; Verdonck, Patrick; Demuynck, Steven; Beyer, Gerald; Tokei, Zsolt

Conference

ADMETA 2009

Title

Integration of porogen-based low-k films: influence of capping layer thickness and long thermal anneals on low-k damage and reliability

Publication type

Oral presentation