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Suspended membrane inductors and capacitors for application in silicon MMIC's

dc.contributor.authorSun, Y.
dc.contributor.authorvan Zeijl, H.
dc.contributor.authorTauritz, J. L.
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-09-29T15:30:05Z
dc.date.available2021-09-29T15:30:05Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1518
dc.sourceIIOimport
dc.titleSuspended membrane inductors and capacitors for application in silicon MMIC's
dc.typeProceedings paper
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage99
dc.source.endpage102
dc.source.conferenceIEEE 1996 Microwave and Millimeter-Wave Monolithic Circuits Symposium. Digest of Papers
dc.source.conferencedate16/06/1996
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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