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Functionality, yield and reliability analysis of SiGe micro-mirrors using automated optical measurement techniques

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T21:50:44Z
dc.date.available2021-10-17T21:50:44Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15194
dc.sourceIIOimport
dc.titleFunctionality, yield and reliability analysis of SiGe micro-mirrors using automated optical measurement techniques
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage199
dc.source.endpage204
dc.source.conference7th ISTC/CSTIC
dc.source.conferencedate19/03/2009
dc.source.conferencelocationShanghai China
imec.availabilityPublished - imec
imec.internalnotesECS Transactions; Vol. 18, Iss. 1


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