Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Methods to measure mechanical properties of NEMS and MEMS: challenges and pitfalls
Metadata
Show full item record
Authors
De Wolf, Ingrid
;
Kalicinski, Stanislaw
;
De Coster, Jeroen
;
Oprins, Herman
Conference
Probing Mechanics at Nanoscale Dimensions
Title
Methods to measure mechanical properties of NEMS and MEMS: challenges and pitfalls
Publication type
Proceedings paper
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login