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Methods to measure mechanical properties of NEMS and MEMS: challenges and pitfalls

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorKalicinski, Stanislaw
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorOprins, Herman
dc.date.accessioned2021-10-17T21:50:55Z
dc.date.available2021-10-17T21:50:55Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15195
dc.sourceIIOimport
dc.titleMethods to measure mechanical properties of NEMS and MEMS: challenges and pitfalls
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorOprins, Herman
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.source.peerreviewyes
dc.source.beginpageII04-06
dc.source.conferenceProbing Mechanics at Nanoscale Dimensions
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 1185


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