Publication:
Integration and dielectric reliability of 30nm 1/2 pitch structures in Aurora LK HM
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1885 since deposited on 2021-10-17
2last month
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Acq. date: 2025-12-10
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Views
1885 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2025-12-10
Citations