Publication:

Integration and dielectric reliability of 30nm 1/2 pitch structures in Aurora LK HM

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Demuynck, Steven  
;
Huffman, Craig
;
Claes, Martine  
;
Suhard, Samuel  
;
Versluijs, Janko  
;
Volders, Henny  
;
Heylen, Nancy  
;
Kellens, Kristof  
;
Croes, Kristof  
;
Struyf, Herbert  
;
Vereecke, Guy  
;
Verdonck, Patrick  
;
De Roest, David  
;
Beynet, Julien
;
Sprey, Hessel  
;
Beyer, Gerald  

Journal

Abstract

Description

Statistics

Views

1887 since deposited on 2021-10-17
2last month
Acq. date: 2026-02-25

Citations

Statistics

Views

1887 since deposited on 2021-10-17
2last month
Acq. date: 2026-02-25

Citations