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Integration and dielectric reliability of 30nm 1/2 pitch structures in Aurora LK HM

dc.contributor.authorDemuynck, Steven
dc.contributor.authorHuffman, Craig
dc.contributor.authorClaes, Martine
dc.contributor.authorSuhard, Samuel
dc.contributor.authorVersluijs, Janko
dc.contributor.authorVolders, Henny
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKellens, Kristof
dc.contributor.authorCroes, Kristof
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVereecke, Guy
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorDe Roest, David
dc.contributor.authorBeynet, Julien
dc.contributor.authorSprey, Hessel
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-17T21:55:40Z
dc.date.available2021-10-17T21:55:40Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15221
dc.sourceIIOimport
dc.titleIntegration and dielectric reliability of 30nm 1/2 pitch structures in Aurora LK HM
dc.typeProceedings paper
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorSuhard, Samuel
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.beginpage1094
dc.source.endpage1095
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate7/10/2009
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - imec


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