Authors

Dictus, Dries; Shamiryan, Denis; Paraschiv, Vasile; Baklanov, Mikhaïl; Boullart, Werner; De Gendt, Stefan; Vinckier, Chris

Conference

AVS 56th International Symposium & Exhibition

Title

Plasma etch chamber wall deposits – impact on etch species density and evaluation of cleaning procedures

Publication type

Meeting abstract

Embargo date

9999-12-31