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Measurement and analysis of parasitic capacitance in FinFETs with high-k dielectrics and metal-gate stack
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Authors
Dixit, Abhisek
;
Bandhyopadhyay, Anirban
;
Collaert, Nadine
;
De Meyer, Kristin
;
Jurczak, Gosia
Conference
22nd International Conference on VLSI Design
Title
Measurement and analysis of parasitic capacitance in FinFETs with high-k dielectrics and metal-gate stack
Publication type
Proceedings paper
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