Authors

El Rifai, Joumana; Witvrouw, Ann; Abdel Aziz, Ahmed; Puers, Bob; Van Hoof, Chris; Sedky, Sherif

Conference

Annual Workshop on Semiconductor Advances for Future Electronics - SAFE

Title

Harsh laser annealing techniques for improved crystallization of a-Si(Ge) layers deposited at 210C

Publication type

Proceedings paper