dc.contributor.author | El Rifai, Joumana | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Abdel Aziz, Ahmed | |
dc.contributor.author | Puers, Bob | |
dc.contributor.author | Van Hoof, Chris | |
dc.contributor.author | Sedky, Sherif | |
dc.date.accessioned | 2021-10-17T22:04:13Z | |
dc.date.available | 2021-10-17T22:04:13Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15265 | |
dc.source | IIOimport | |
dc.title | Harsh laser annealing techniques for improved crystallization of a-Si(Ge) layers deposited at 210C | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.source.peerreview | no | |
dc.source.beginpage | 63 | |
dc.source.endpage | 66 | |
dc.source.conference | Annual Workshop on Semiconductor Advances for Future Electronics - SAFE | |
dc.source.conferencedate | 26/11/2009 | |
dc.source.conferencelocation | Eindhoven The Netherlands | |
imec.availability | Published - imec | |