Authors

Teerlinck, Ivo; Mertens, Paul; Vos, Rita; Meuris, Marc; Heyns, Marc

Conference

Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

Effect of anions on copper outplating from HF solutions

Publication type

Proceedings paper

Embargo date

9999-12-31